JPH0485730U - - Google Patents
Info
- Publication number
- JPH0485730U JPH0485730U JP12875490U JP12875490U JPH0485730U JP H0485730 U JPH0485730 U JP H0485730U JP 12875490 U JP12875490 U JP 12875490U JP 12875490 U JP12875490 U JP 12875490U JP H0485730 U JPH0485730 U JP H0485730U
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- outputs
- wafer
- power supplies
- detection device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 6
- 230000001427 coherent effect Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12875490U JPH0485730U (en]) | 1990-11-29 | 1990-11-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12875490U JPH0485730U (en]) | 1990-11-29 | 1990-11-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0485730U true JPH0485730U (en]) | 1992-07-24 |
Family
ID=31876198
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12875490U Pending JPH0485730U (en]) | 1990-11-29 | 1990-11-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0485730U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014529888A (ja) * | 2011-08-16 | 2014-11-13 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | チャンバ内の基板を感知するための方法および装置 |
-
1990
- 1990-11-29 JP JP12875490U patent/JPH0485730U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014529888A (ja) * | 2011-08-16 | 2014-11-13 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | チャンバ内の基板を感知するための方法および装置 |
| JP2017038071A (ja) * | 2011-08-16 | 2017-02-16 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | チャンバ内の基板を感知するための方法および装置 |